Chiller UNIT

Accurate temperature control of process equipment

in semiconductor manufacturing processes

The SEMI Chiller thermostat is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as etching/film/glue/development equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.).
The SEMI Chiller thermostat is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as etching/film/glue/development equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.).
The SEMI Chiller thermostat is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as etching/film/glue/development equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.).
The SEMI Chiller thermostat is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as etching/film/glue/development equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.).
The SEMI Chiller thermostat is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as etching/film/glue/development equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.).