The SEMI Chiller thermostat is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as etching/film/glue/development equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.).

The SEMI Chiller thermostat is a temperature control device in the process mainly composed of a liquid pump, a heat exchanger, a liquid storage tank, a refrigeration compressor, and a control system.

characteristic

Advanced control technology, including fuzzy control and feedforward control, ensures that the equipment has high temperature control accuracy and good temperature tracking performance

Advanced energy-saving technologies, Hot-Gas， Frequency conversion technology has significantly reduced equipment energy consumption

Advanced sealing and leak detection technology greatly reduces the leakage and evaporation of circulating liquid

Ultra low temperature refrigeration technology, single/multi-stage cascade technology, multi-layer composite insulation technology

Support users' multi-channel/multi type customization needs